The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 14, 2020
Filed:
Mar. 03, 2016
Applicant:
Sharp Kabushiki Kaisha, Sakai, Osaka, JP;
Inventors:
Tetsunori Tanaka, Sakai, JP;
Wataru Nakamura, Sakai, JP;
Shoji Okazaki, Sakai, JP;
Masaki Fujiwara, Sakai, JP;
Assignee:
SHARP KABUSHIKI KAISHA, Sakai, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 51/56 (2006.01); B23K 26/57 (2014.01); H01L 51/00 (2006.01); H01L 27/12 (2006.01); H05B 33/10 (2006.01); H01L 21/02 (2006.01); B23K 26/064 (2014.01); H01L 51/50 (2006.01); B23K 101/36 (2006.01);
U.S. Cl.
CPC ...
H01L 51/56 (2013.01); B23K 26/064 (2015.10); B23K 26/57 (2015.10); H01L 21/02 (2013.01); H01L 27/1266 (2013.01); H01L 51/003 (2013.01); H01L 51/5012 (2013.01); H05B 33/10 (2013.01); B23K 2101/36 (2018.08); H01L 2251/56 (2013.01);
Abstract
A method includes steps of (a) forming a substrate layerabove a support substratewhich is transparent, and then a thin-film element above the substrate layer; and (b) emitting laser beams La and Lb to a face of the support substrateopposite to another face of the support substrate to which the substrate layerand the thin-film element are formed, and delaminating the substrate layerand the thin-film element from the support substrate. In step (b), the laser beams La and Lb are emitted from different directions.