The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 14, 2020

Filed:

Jun. 27, 2018
Applicant:

Marvell International Ltd., Hamilton, BM;

Inventors:

Hui Wang, Pleasanton, CA (US);

Runzi Chang, San Jose, CA (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/76 (2006.01); H01L 29/78 (2006.01); H01L 27/088 (2006.01); H01L 29/66 (2006.01); H01L 29/10 (2006.01); H01L 21/8234 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7856 (2013.01); H01L 21/823431 (2013.01); H01L 27/0886 (2013.01); H01L 29/1079 (2013.01); H01L 29/66795 (2013.01);
Abstract

A fin field effect transistor (finFET) includes a semiconductor substrate including at least one fin feature, a diffusion region formed on the semiconductor substrate and extending through the diffusion region, and a gate formed on the diffusion region and the at least one fin feature. The gate includes a split gate structure including a first gate region, a second gate region, a gap separating the first gate region and the second gate region, and a contact region electrically connecting the first gate region and the second gate region. A plurality of source/drain regions are formed in the diffusion region. The plurality of source/drain regions includes a source drain region in the gap between the first gate region and the second gate region. A plurality of pocket dopant regions are formed in the diffusion region. The plurality of pocket dopant regions includes at least one pocket dopant region in the gap between the first gate region and the second gate region.


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