The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 14, 2020

Filed:

Jul. 31, 2018
Applicant:

Alpha and Omega Semiconductor Limited, Hamilton, BM;

Inventors:

Anup Bhalla, Santa Clara, CA (US);

Xiaobin Wang, San Jose, CA (US);

Ji Pan, San Jose, CA (US);

Sung-Po Wei, San Jose, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/78 (2006.01); H01L 29/10 (2006.01); H01L 29/423 (2006.01); H01L 29/66 (2006.01); H01L 29/872 (2006.01); H01L 21/265 (2006.01); H01L 29/417 (2006.01); H01L 29/06 (2006.01); H01L 29/165 (2006.01); H01L 29/45 (2006.01); H01L 29/47 (2006.01);
U.S. Cl.
CPC ...
H01L 29/7806 (2013.01); H01L 21/26513 (2013.01); H01L 29/1083 (2013.01); H01L 29/1095 (2013.01); H01L 29/41741 (2013.01); H01L 29/4236 (2013.01); H01L 29/66143 (2013.01); H01L 29/66727 (2013.01); H01L 29/66734 (2013.01); H01L 29/7809 (2013.01); H01L 29/7811 (2013.01); H01L 29/7813 (2013.01); H01L 29/8725 (2013.01); H01L 21/26586 (2013.01); H01L 29/0623 (2013.01); H01L 29/165 (2013.01); H01L 29/41766 (2013.01); H01L 29/456 (2013.01); H01L 29/47 (2013.01);
Abstract

Fabricating a semiconductor device includes: forming a first gate trench and a second gate trench in an epitaxial layer overlaying a semiconductor substrate; depositing gate material in the first gate trench to form a first gate and depositing gate material in the second gate trench to form a second gate; forming a body; forming a source; forming an active region contact trench that extends through the source and the body, and a gate contact trench within the second gate; forming an island region under the active region contact trench and disconnected from the body, the island region having an opposite polarity as the epitaxial layer; and disposing a first electrode within the active region contact trench and a second electrode within the gate contact trench.


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