The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 14, 2020

Filed:

Sep. 12, 2018
Applicant:

Toshiba Memory Corporation, Minato-ku, JP;

Inventors:

Hajime Kaneko, Yokkaichi, JP;

Takuya Inatsuka, Yokkaichi, JP;

Hideki Inokuma, Yokkaichi, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/1157 (2017.01); H01L 27/11582 (2017.01); H01L 27/11573 (2017.01); H01L 27/11524 (2017.01);
U.S. Cl.
CPC ...
H01L 27/11582 (2013.01); H01L 27/1157 (2013.01); H01L 27/11524 (2013.01); H01L 27/11573 (2013.01);
Abstract

A semiconductor memory device includes a first member spreading along a first direction and a second direction, a stacked body provided on a third-direction side when viewed from the first member, and a second member provided inside the first member and exposed at a surface of the first member on the third-direction side. A configuration of an end portion in the first direction of the stacked body is a staircase configuration having terraces formed every conductive film. The second member is made from a material different from a material of the first member. The second member is totally disposed in a region opposing a total length of an end edge of the stacked body on the first-direction side, and not disposed in an outer region of the stacked body on the second-direction side.


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