The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 14, 2020
Filed:
Jul. 25, 2017
Applicant:
Hitachi Kokusai Electric Inc., Tokyo, JP;
Inventors:
Akihito Watanabe, Toyama, JP;
Ryo Yamaguchi, Toyama, JP;
Yasuhiro Joho, Toyama, JP;
Katsumi Takashima, Toyama, JP;
Assignee:
KOKUSAI ELECTRIC CORPORATION, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G05B 15/00 (2006.01); G05B 19/00 (2006.01); H01L 21/677 (2006.01); G05B 19/42 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67796 (2013.01); G05B 19/42 (2013.01); H01L 21/67098 (2013.01);
Abstract
A teaching jig includes: a first plate that determines a substrate loading position in a forward/backward direction with respect to a substrate holder which holds a substrate; a second plate that determines the substrate loading position in a leftward/rightward direction with respect to the substrate holder, the second plate being installed to be perpendicular to the first plate and movable in the forward/backward direction; and a positioning target pin installed in the first plate.