The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 14, 2020
Filed:
Sep. 17, 2018
Applicant:
Tescan Brno, S.r.o., Brno, CZ;
Inventors:
Jaroslav Jiruse, Blansko, CZ;
Filip Lopour, Brno, CZ;
Assignee:
TESCAN Brno, s.r.o., Brno, CZ;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/05 (2006.01); H01J 37/20 (2006.01); H01J 37/21 (2006.01); H01J 37/28 (2006.01); H01J 37/244 (2006.01);
U.S. Cl.
CPC ...
H01J 37/244 (2013.01); H01J 37/05 (2013.01); H01J 37/20 (2013.01); H01J 37/21 (2013.01); H01J 37/28 (2013.01); H01J 2237/20207 (2013.01); H01J 2237/24475 (2013.01); H01J 2237/31745 (2013.01); H01J 2237/31749 (2013.01);
Abstract
A device with an ion column and a scanning electron microscope comprises at least one column detector of signal electrons placed inside or on the ion column. Signal generated on the sample is detected on the column detector during landing of a broad beam generated by the scanning electron microscope on the sample surface.