The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 14, 2020

Filed:

Jan. 30, 2019
Applicant:

Hamamatsu Photonics K.k., Hamamatsu-shi, Shizuoka, JP;

Inventors:

Tsuyoshi Kodama, Hamamatsu, JP;

Yasuyuki Kohno, Hamamatsu, JP;

Shinichi Hara, Hamamatsu, JP;

Kazuto Ohashi, Hamamatsu, JP;

Assignee:

HAMAMATSU PHOTONICS K.K., Hamamatsu-shi, Shizuoka, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 9/28 (2006.01); H01J 9/26 (2006.01); H01J 9/18 (2006.01); G01J 1/42 (2006.01); H01J 31/49 (2006.01);
U.S. Cl.
CPC ...
H01J 9/28 (2013.01); H01J 9/18 (2013.01); H01J 9/26 (2013.01); G01J 1/429 (2013.01); H01J 31/49 (2013.01);
Abstract

A first member made of an insulating material and a jig with a protrusion narrowing toward a distal end side are prepared, and at least one of the first member and the jig is heated to a temperature at which the first member can melt and deform. After the jig is brought into contact with the first member with the first member and the plurality of protrusions facing each other, the jig is removed, and an intermediate body is formed including the first member formed with a plurality of recesses, and a plurality of conductive members passing through the first member and projecting into the recesses. A second member is prepared, openings of the plurality of recesses are closed, and the second member is hermetically joined to the intermediate body to form a plurality of internal spaces where electron is emitted, and forming a joined body.


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