The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 14, 2020

Filed:

Jan. 03, 2018
Applicant:

International Business Machines Corporation, Armonk, NY (US);

Inventors:

Baozhen Li, South Burlington, VT (US);

Chih-Chao Yang, Glenmont, NY (US);

Theo Standaert, Clifton Park, NY (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G06F 17/50 (2006.01); G03F 1/70 (2012.01); H01L 23/00 (2006.01); H01L 23/532 (2006.01); H01L 23/522 (2006.01); H01L 23/528 (2006.01);
U.S. Cl.
CPC ...
G06F 17/5077 (2013.01); G03F 1/70 (2013.01); G06F 17/5081 (2013.01); G06F 2217/04 (2013.01); G06F 2217/78 (2013.01); G06F 2217/82 (2013.01); H01L 23/528 (2013.01); H01L 23/5226 (2013.01); H01L 23/53209 (2013.01); H01L 23/53228 (2013.01); H01L 23/53242 (2013.01); H01L 23/53257 (2013.01);
Abstract

A computer implemented method, a system and a computer readable storage medium configured to conduct the following: determining a reliability parameter of an initial hybrid metallization to determine a determined reliability parameter, comparing the determined reliability parameter to a reliability limit and determining a reliability ratio, determining a performance parameter of the initial hybrid metallization to determine a determined performance parameter, comparing the determined performance parameter to a performance limit and determining a performance ratio, determining a reliability indice from the reliability ratio, determining a performance indice from the performance ratio, determining a reliability score from a combination of the determined reliability parameter and the reliability indice, determining a performance score from a combination of the determined performance parameter and the performance indice, comparing the reliability score to the performance score, selecting a first interconnect and forming the first interconnect on the mask.


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