The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 14, 2020
Filed:
Feb. 28, 2018
Konica Minolta, Inc., Tokyo, JP;
Mitsuru Yokoyama, Takatsuki, JP;
Yuko Yamamoto, Takatsuki, JP;
KONICA MINOLTA, INC., Tokyo, JP;
Abstract
In respective methods for manufacturing a high aspect ratio structure and an ultrasonic probe, a plurality of holes extending in a direction crossing a main surface of a substrate are formed, a plurality of first regions and second regions excluding the first regions from the main surface are periodically defined, and partition walls between the plurality of holes formed in the substrate corresponding to the first regions are removed by etching so that part of each of the partition walls within a predetermined range excluding a bottom portion is left. A high aspect ratio structure and an X-ray imaging apparatus include, over a side wall, a porous member including a plurality of holes extending in a direction crossing a grating surface within a predetermined range excluding a bottom portion in each of a plurality of recesses in a grating.