The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 14, 2020
Filed:
Feb. 27, 2018
Applicant:
University of Florida Research Foundation, Incorporated, Gainesville, FL (US);
Inventors:
Mark Sheplak, Gainesville, FL (US);
Casey B. Keane, Albuquerque, NM (US);
Assignee:
University of Florida Research Foundation, Incorporated, Gainesville, FL (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01L 1/14 (2006.01); C23C 14/02 (2006.01); C23C 14/18 (2006.01); C23C 14/58 (2006.01); G03F 7/42 (2006.01); G03F 7/40 (2006.01); G03F 7/16 (2006.01); C23C 14/34 (2006.01); G03F 7/20 (2006.01); G03F 7/32 (2006.01); C23C 14/16 (2006.01);
U.S. Cl.
CPC ...
G01L 1/142 (2013.01); C23C 14/021 (2013.01); C23C 14/165 (2013.01); C23C 14/185 (2013.01); C23C 14/34 (2013.01); C23C 14/5873 (2013.01); G03F 7/162 (2013.01); G03F 7/168 (2013.01); G03F 7/20 (2013.01); G03F 7/32 (2013.01); G03F 7/40 (2013.01); G03F 7/422 (2013.01);
Abstract
Microelectromechanical systems (MEMS)-based devices capable of measuring wall shear stress vectors in three-dimensional aerodynamic flow fields are provided. A device can include a sensor that senses wall shear stress vectors in two in-plane axes and an interface circuit including a modulation section and a demodulation section. The device can be capable of making direct, real-time wall shear stress measurements without any need for using secondary measurements and/or models for validation.