The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 14, 2020
Filed:
Feb. 01, 2018
Canon Kabushiki Kaisha, Tokyo, JP;
Minako Nakasu, Tokyo, JP;
Motokazu Kobayashi, Yokohama, JP;
Hiroto Numazawa, Kawasaki, JP;
Toshio Tomiyoshi, Yokohama, JP;
Youichi Fukaya, Tokyo, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A piezoelectric actuator has a ground substrate layer, an intermediate layer containing at least one of Ti and TiOon the ground substrate layer, an electrode layer containing Pt on the intermediate layer, and a piezoelectric layer containing lead zirconate titanate on the electrode layer, in which the lead zirconate titanate contained in the piezoelectric layer is preferentially oriented in the (100), (001), or (110) direction, the Pt contained in the electrode layer is preferentially oriented in the (111) direction, and the half width of the rocking curve in the (111) plane of the Pt contained in the electrode layer in X-ray diffraction is 1° or more.