The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 14, 2020

Filed:

Sep. 30, 2015
Applicants:

Commissariat a L'energie Atomique ET Aux Energies Alternatives, Paris, FR;

Stmicroelectronics (Crolles 2) Sas, Crolles, FR;

Universite Grenoble Alpes, Saint Martin d'Heres, FR;

Inventors:

Fabrice Casset, Tencin, FR;

Skandar Basrour, Grenoble, FR;

Cédrick Chappaz, Crolles, FR;

Jean-Sébastien Danel, Echirolles, FR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/09 (2006.01); B06B 3/00 (2006.01); B81B 3/00 (2006.01); B06B 1/04 (2006.01); B06B 1/06 (2006.01); H01L 41/18 (2006.01); H01L 41/25 (2013.01);
U.S. Cl.
CPC ...
B06B 3/00 (2013.01); B06B 1/045 (2013.01); B06B 1/06 (2013.01); B81B 3/0021 (2013.01); B81B 3/0024 (2013.01); H01L 41/094 (2013.01); H01L 41/18 (2013.01); H01L 41/25 (2013.01); B81B 2201/032 (2013.01);
Abstract

A mechanical structure comprising a stack including an active substrate and at least one actuator designed to generate vibrations at the active substrate, the stack comprises an elementary structure for amplifying the vibrations: positioned between the actuator and the active substrate, the structure designed to transmit and amplify the vibrations; and comprising at least one trench, located between the actuator and the active substrate. A method for manufacturing the structure comprising the use of a temporary substrate is provided.


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