The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 14, 2020

Filed:

Oct. 14, 2015
Applicant:

Samsung Display Co., Ltd., Yongin-si, KR;

Inventors:

Jaemin Hong, Yongin-si, KR;

Hyunseung Kang, Yongin-si, KR;

Hanul Kwen, Yongin-si, KR;

Jeunghoon Kim, Yongin-si, KR;

Hanyoung Kim, Yongin-si, KR;

Younghoon Roh, Yongin-si, KR;

Jihye Seo, Yongin-si, KR;

Wooyoung Jung, Yongin-si, KR;

Pilseon Ji, Yongin-si, KR;

Assignee:

Samsung Display Co., Ltd., Yongin-si, KR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B05D 1/32 (2006.01); B05C 21/00 (2006.01); C23C 14/04 (2006.01); B05B 12/20 (2018.01);
U.S. Cl.
CPC ...
B05D 1/32 (2013.01); B05B 12/20 (2018.02); B05C 21/005 (2013.01); C23C 14/042 (2013.01);
Abstract

A mask assembly for thin film deposition includes: a mask frame including an opening, the mask frame disposed surrounding the opening; and a mask unit including: first masks mounted on the mask frame, the first masks extending in a first direction; a second mask disposed on the first masks, the second mask including: one open hole; and at least one foreign substance discharge hole; and a third mask disposed on the second mask, the third mask extending in a second direction and including deposition holes, wherein the second direction crosses the first direction, and wherein a substrate is disposed on the third mask.


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