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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10529531 B1

PDFFull Text
Date of Patent:
Jan. 07, 2020

Filed:

Nov. 28, 2018

Ion source and electron source having single-atom termination structure, tip having single-atom termination structure, gas field ion source, focused ion beam apparatus, electron source, electron microscope, mask repair apparatus, and method of manufacturing tip having single-atom termination structure

Applicant:

Hitachi High-tech Science Corporation, Tokyo, JP;

Inventors:

Chuhei Oshima, Gunma, JP;

Masahiko Tomitori, Ishikawa, JP;

Anto Yasaka, Tokyo, JP;

Tatsuya Shimoda, Nagano, JP;

Assignee:

HITACHI HIGH-TECH SCIENCE CORPORATION, Tokyo, JP;

Attorney:

Holland & Hart LLP

Primary Examiner:

Michael Maskell

Int. Cl.
CPC ...
H01J 37/00 (2006.01); H01J 37/08 (2006.01); H01J 37/28 (2006.01); H01J 37/305 (2006.01); H01J 37/30 (2006.01); H01J 37/21 (2006.01); H01J 37/252 (2006.01);
U.S. Cl.
CPC ...
H01J 37/08 (2013.01); H01J 37/21 (2013.01); H01J 37/28 (2013.01); H01J 37/3002 (2013.01); H01J 37/3053 (2013.01); H01J 37/252 (2013.01); H01J 2237/0807 (2013.01); H01J 2237/2623 (2013.01);
Abstract

Provided is a tip capable of repeatedly regenerating a single-atom termination structure in which a distal end is formed of only one atom. A tip () having a single-atom termination structure includes: a thin line member () made of a first metal material; a protruding portion () made of a second metal material, which is formed at least in a distal end portion () of the thin line member (), and has a distal end terminated with only one atom; and a supply portion () made of the second metal material to be supplied to the protruding portion (), which is formed in the vicinity of the distal end portion () of the thin line member ().

Find Patent Forward Citations

Oshima, Chuhei. (2020). Ion source and electron source having single-atom termination structure, tip having single-atom termination structure, gas field ion source, focused ion beam apparatus, electron source, electron microscope, mask repair apparatus, and method of manufacturing tip having single-atom termination structure (U.S. Patent No. 10529531). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10529531

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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