The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 07, 2020
Filed:
Apr. 09, 2018
Applicant:
Idex Asa, Fornebu, NO;
Inventor:
Roger A. Bauchspies, Gustine, CA (US);
Assignee:
IDEX ASA, Fornebu, NO;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06K 9/00 (2006.01); G06K 9/46 (2006.01); G06K 9/62 (2006.01);
U.S. Cl.
CPC ...
G06K 9/00087 (2013.01); G06K 9/4604 (2013.01); G06K 9/6202 (2013.01);
Abstract
A system, method, and computer program product for producing a consistent desired set of operational parameters during use of a patterning solution that would otherwise alter an initial set of operational parameters. A variable match process is adjusted dynamically to counter changes to the performance metric to tend to maintain the performance metric at a desired predetermined specification.