The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 07, 2020
Filed:
Jul. 10, 2015
Inertia sensor with improved detection sensitivity using servo voltage to detect a physical quantity
Hitachi, Ltd., Chiyoda-ku, Tokyo, JP;
Atsushi Isobe, Tokyo, JP;
Yuki Furubayashi, Tokyo, JP;
Takashi Oshima, Tokyo, JP;
Yuudai Kamada, Tokyo, JP;
Takashi Shiota, Tokyo, JP;
Chisaki Takubo, Tokyo, JP;
Noriyuki Sakuma, Tokyo, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
There is provided an inertia sensor with low noise and high sensitivity. The inertia sensor captures a physical quantity as a change of electrostatic capacitance and detects the physical quantity based on a servo voltage generating electrostatic force that cancels the change of the electrostatic capacitance. The inertia sensor includes a detection capacitor unit that captures the physical quantity as the change of the electrostatic capacitance and a servo capacitor unit to which the servo voltage is applied. Here, the detection capacitor unit and the servo capacitor unit are connected mechanically through an insulation material.