The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 07, 2020
Filed:
Dec. 15, 2016
Southeast University, Nanjing, CN;
Jintang Shang, Nanjing, CN;
Bin Luo, Nanjing, CN;
SOUTHEAST UNIVERSITY, Nanjing, CN;
Abstract
The present invention discloses a micro three-dimensional shell resonator gyroscope, a method for fabricating a micro shell resonator, a method for fabricating a composite structure substrate, and a method for fabricating a micro three-dimensional shell resonator gyroscope. A micro three-dimensional shell resonator gyroscope includes a packaging shell cover, a micro shell resonator, and a composite structure substrate. The micro shell resonator includes a shell, a single-ended column, and a flange. The composite structure substrate includes a non-planar electrode, a conductive structure, an electrical isolation part, and a main body part. The non-planar electrode includes a driving electrode, a detection circuit, an annular exciting electrode, and an isolation electrode.