The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 07, 2020
Filed:
May. 06, 2016
Applicant:
Safematic Gmbh, Bad Ragaz, CH;
Inventors:
Assignee:
safematic GmbH, Zizers, CH;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/34 (2006.01); C23C 14/34 (2006.01); H01J 37/32 (2006.01); C23C 14/35 (2006.01);
U.S. Cl.
CPC ...
C23C 14/34 (2013.01); C23C 14/35 (2013.01); H01J 37/32449 (2013.01); H01J 37/32715 (2013.01); H01J 37/32935 (2013.01); H01J 37/345 (2013.01); H01J 37/347 (2013.01); H01J 37/3411 (2013.01); H01J 37/3435 (2013.01); H01J 37/3444 (2013.01); H01J 37/3476 (2013.01); H01J 37/3488 (2013.01);
Abstract
A sputter unit is introduced comprising a housing, a gas inlet, an interface for removable connecting the sputter unit to a vacuum chamber, a gas outlet arranged for supplying a process gas received via the gas inlet to the vacuum chamber, an interface for removable connecting the sputter unit to a base unit comprising a vacuum pump for generating a vacuum in the vacuum chamber, and a transformer arranged in the housing for increasing a supply voltage into an ionisation voltage for ionising the process gas supplied via the gas outlet to the vacuum chamber.