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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10526197 B1

PDFFull Text
Date of Patent:
Jan. 07, 2020

Filed:

Sep. 05, 2017

Substrate for sensor, physical quantity detection sensor, acceleration sensor, electronic apparatus, vehicle, and method of manufacturing substrate for sensor

Applicant:

Seiko Epson Corporation, Tokyo, JP;

Inventor:

Masayuki Oto, Okaya, JP;

Assignee:

SEIKO EPSON CORPORATION, Tokyo, JP;

Attorney:

Oliff PLC

Primary Examiner:

Ratisha Mehta

Int. Cl.
CPC ...
B81B 3/00 (2006.01); B81C 1/00 (2006.01); G01P 15/10 (2006.01); G01P 15/12 (2006.01); G01P 15/08 (2006.01); G01P 15/09 (2006.01); G01P 15/097 (2006.01); G01C 19/5726 (2012.01);
U.S. Cl.
CPC ...
B81B 3/0021 (2013.01); B81B 3/0051 (2013.01); B81C 1/0015 (2013.01); G01P 15/0802 (2013.01); G01P 15/097 (2013.01); G01P 15/0922 (2013.01); G01P 15/10 (2013.01); G01P 15/123 (2013.01); B81B 2201/0235 (2013.01); B81B 2203/0118 (2013.01); G01C 19/5726 (2013.01);
Abstract

A cantilever section as a substrate for a sensor includes: a base section; a movable section connected to the base section; an arm portion as a support portion extending along the movable section from the base section when viewed in a planar view as viewed from a thickness direction of the movable section; and a gap portion formed to have a predetermined gap between the movable section and the arm portion when viewed in the planar view, in which a ridge portion formed as an etching residue having a top portion on the side facing the gap portion is provided on each of facing surfaces of the movable section and the arm portion in the gap portion, and the predetermined gap is a gap between a top portion of a first ridge portion which is the ridge portion formed at one of the movable section and the arm portion, and a top portion of a second ridge portion which is the ridge portion formed at the other of the movable section and the arm portion.

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