The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 31, 2019
Filed:
Jul. 11, 2018
Applicant:
Rohm Co., Ltd., Kyoto, JP;
Inventors:
Yoshikazu Fujimori, Kyoto, JP;
Tomohiro Date, Kyoto, JP;
Assignee:
ROHM CO., LTD., Kyoto, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/04 (2006.01); H01L 41/09 (2006.01); H01L 41/053 (2006.01); H01L 41/08 (2006.01); H01L 41/047 (2006.01); H01L 41/29 (2013.01); B41J 2/16 (2006.01); B41J 2/14 (2006.01); H01L 37/02 (2006.01); H01L 41/332 (2013.01);
U.S. Cl.
CPC ...
H01L 41/0533 (2013.01); B41J 2/14233 (2013.01); B41J 2/161 (2013.01); B41J 2/1628 (2013.01); B41J 2/1629 (2013.01); B41J 2/1631 (2013.01); B41J 2/1642 (2013.01); B41J 2/1646 (2013.01); H01L 37/02 (2013.01); H01L 41/0475 (2013.01); H01L 41/0477 (2013.01); H01L 41/0478 (2013.01); H01L 41/0805 (2013.01); H01L 41/0973 (2013.01); H01L 41/29 (2013.01); H01L 41/332 (2013.01); B41J 2002/14241 (2013.01); B41J 2002/14491 (2013.01);
Abstract
An inkjet printing head includes a piezoelectric element having a lower electrode, a piezoelectric film formed above the lower electrode, and an upper electrode formed above the piezoelectric film, a hydrogen barrier film covering an entirety of a side surface of the upper electrode and the piezoelectric film, and an interlayer insulating film that has an opening at an upper surface center of the upper electrode, is laminated on the hydrogen barrier film, and faces the entirety of the side surface of the upper electrode and the piezoelectric film across the hydrogen barrier film.