The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 31, 2019

Filed:

Jan. 27, 2012
Applicants:

Ravi Prasad, Corvallis, OR (US);

Dennis R. Hollars, San Jose, CA (US);

Inventors:

Ravi Prasad, Corvallis, OR (US);

Dennis R. Hollars, San Jose, CA (US);

Assignee:

VITRIFLEX, INC., San Jose, CA (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 31/0203 (2014.01); C23C 14/08 (2006.01); C23C 14/56 (2006.01); H01L 51/52 (2006.01); C23C 16/44 (2006.01); C25B 9/08 (2006.01); G02F 1/01 (2006.01); G02F 1/1339 (2006.01); G02F 1/167 (2019.01); H01L 21/56 (2006.01); H01L 23/00 (2006.01); H01L 31/0392 (2006.01); H01L 31/049 (2014.01);
U.S. Cl.
CPC ...
H01L 31/0203 (2013.01); C23C 14/08 (2013.01); C23C 14/562 (2013.01); C23C 16/44 (2013.01); C25B 9/08 (2013.01); G02F 1/0107 (2013.01); G02F 1/1339 (2013.01); G02F 1/167 (2013.01); H01L 21/56 (2013.01); H01L 23/564 (2013.01); H01L 31/03926 (2013.01); H01L 31/049 (2014.12); H01L 51/5256 (2013.01); H01L 51/5259 (2013.01); H01L 2924/0002 (2013.01); Y02E 10/541 (2013.01); Y02E 10/542 (2013.01); Y02E 10/549 (2013.01); Y02P 20/134 (2015.11); Y10T 428/265 (2015.01); Y10T 428/31504 (2015.04); Y10T 428/31678 (2015.04);
Abstract

A multilayer stack is described. The multilayer stack includes: (i) one or more inorganic barrier layers for reducing transport of gas or vapor molecules therethrough; (ii) an inorganic reactive layer disposed adjacent to one or more of the inorganic barrier layers, and the reactive layer capable of reacting with the gas or the vapor molecules; and (iii) wherein, in an operational state of the multilayer stack, the vapor or the gas molecules that diffuse through one or more of the inorganic barrier layers react with the inorganic reactive layer, and thereby allow said multilayer stack to be substantially impervious to the gas or the vapor molecules.


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