The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 31, 2019

Filed:

Jul. 05, 2018
Applicant:

Toyota Jidosha Kabushiki Kaisha, Toyota-shi, Aichi, JP;

Inventors:

Hidefumi Takaya, Toyota, JP;

Yasushi Urakami, Kariya, JP;

Narumasa Soejima, Nagakute, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/00 (2006.01); H01L 29/10 (2006.01); H01L 29/423 (2006.01); H01L 29/06 (2006.01); H01L 29/78 (2006.01); H01L 29/739 (2006.01);
U.S. Cl.
CPC ...
H01L 29/1095 (2013.01); H01L 29/0688 (2013.01); H01L 29/0696 (2013.01); H01L 29/1045 (2013.01); H01L 29/4236 (2013.01); H01L 29/42368 (2013.01); H01L 29/7397 (2013.01); H01L 29/7813 (2013.01);
Abstract

A semiconductor device may be provided with a semiconductor substrate, an upper electrode, a lower electrode and a gate electrode provided within a trench via a gate insulator film. The semiconductor substrate may include a p-type body layer being in contact with the upper electrode, an n-type drift layer intervening between the body layer and the lower electrode, a p-type floating region provided along a bottom surface of the trench, and a p-type connection region extending between the body layer and the floating region along a side surface of the trench. The trench may include a first section where the connection region is not provided and a second section where the connection region is provided. An inclination angle of the side surface of the trench in the second section may be greater than an inclination angle of the side surface of the trench in the first section.


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