The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 31, 2019

Filed:

Aug. 24, 2018
Applicant:

Tower Semiconductor Ltd., Migdal Haemek, IL;

Inventors:

Einat Ophir Arad, Migdal Haemek, IL;

Sharon Levin, Haifa, IL;

Allon Parag, Ramat Ishai, IL;

Eran Lipp, Midgal Haemek, IL;

Yosef Avrahamov, Migdal Haemek, IL;

Assignee:

Tower Semiconductor Ltd., Migdal Haemek, IL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/74 (2006.01); H01L 27/12 (2006.01); H01L 21/84 (2006.01); H01L 29/78 (2006.01); H01L 29/861 (2006.01); H01L 29/06 (2006.01);
U.S. Cl.
CPC ...
H01L 21/74 (2013.01); H01L 21/84 (2013.01); H01L 27/1207 (2013.01); H01L 29/0684 (2013.01); H01L 29/861 (2013.01); H01L 29/7818 (2013.01); H01L 29/7824 (2013.01);
Abstract

An SOI IC includes a polysilicon/silicon plug extending through the buried insulation layer between a P-type handle layer and a P-type device layer. An N-type well region is formed in the device layer over the polysilicon/silicon plug, and then a high-voltage (HV) device is formed in the well region such that part of its drift region is located over the polysilicon/silicon plug. Doping of the well region, the polysilicon/silicon plug and the handle layer is coordinated to form a P-N junction diode that couples the HV device, by way of the polysilicon/silicon plug, to a ground potential applied to the handle layer, thereby increasing the HV device's breakdown voltage by expanding its depletion region to include the handle layer. The polysilicon/silicon plug grows in holes formed through the insulation layer during the epitaxial silicon growth process used to form the device layer.


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