The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 31, 2019
Filed:
Sep. 18, 2017
Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;
Dae Wee Kong, Yongin-si, KR;
Kang Min Park, Hwaseong-si, KR;
Chul Hwan Choi, Seoul, KR;
Yong Joon Hong, Seongnam-si, KR;
Kang Soo Kim, Uiwang-si, KR;
Sang Ho Roh, Seoul, KR;
Heok Jae Lee, Suwon-si, KR;
Sang Jin Choi, Yongin-si, KR;
Abstract
A substrate transfer apparatus includes: a chamber including a lower surface, an upper surface opposing the lower surface, and a side surface extending between the lower surface and the upper surface; and a fan filter unit disposed on the upper surface of the chamber and configured to introduce air into the chamber. The chamber includes an inclined surface extending from the upper surface to the side surface and positioned to a side of the fan filter unit.