The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 31, 2019
Filed:
Oct. 11, 2016
Analog Devices, Inc., Norwood, MA (US);
Jianglong Zhang, Vienna, VA (US);
Analog Devices, Inc., Norwood, MA (US);
Abstract
A microelectromechanical systems (MEMS) sensor device with a compound folded tether is disclosed. The compound folded tether connects a movable proof mass to a substrate, and includes folds composed of multiple short segments aligned with each other to form a longer composite segment having multiple breaks along its length. The use of multiple short segments to create a longer composite segment of the folded tether provides the tether with increased stiffness without altering the fundamental resonance frequency of the tether. The increased stiffness can beneficially lower the occurrence of stiction. Moreover, such a tether configuration provides larger separation between the tether's fundamental resonance frequency and higher order resonant mode frequencies, meaning that the higher order modes may be suppressed in typical operation of the MEMS sensor device.