The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 31, 2019
Filed:
Oct. 22, 2015
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventor:
Matthew Busche, Santa Clara, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01K 11/32 (2006.01); C03C 25/16 (2006.01); G02B 6/26 (2006.01); G02B 6/255 (2006.01); C03C 25/1065 (2018.01);
U.S. Cl.
CPC ...
G01K 11/32 (2013.01); C03C 25/16 (2013.01); C03C 25/1068 (2018.01); G02B 6/2552 (2013.01); G02B 6/262 (2013.01);
Abstract
An optical fiber temperature sensor including a lead-in fiber and black body emitter. The lead-in optical fiber includes a fiber end, and the black body emitter is fused on the fiber end, wherein the black body emitter is made up of a melted high emissivity material included integrally in melted silica. Further embodiments include temperature monitoring apparatus with one or more optical fiber temperature sensors, and electronic device processing apparatus including optical fiber temperature monitoring. Numerous other aspects and embodiments are included.