The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 31, 2019

Filed:

Mar. 09, 2018
Applicant:

Vat Holding Ag, Haag, CH;

Inventors:

Andreas Hofer, Widnau, CH;

Christoph Böhm, Gams, CH;

Adrian Eschenmoser, Grabs, CH;

Assignee:

VAT HOLDING AG, Haag, CH;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F16K 37/00 (2006.01); F16K 51/02 (2006.01); F16K 3/10 (2006.01); F16K 3/18 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
F16K 37/0058 (2013.01); F16K 3/10 (2013.01); F16K 3/18 (2013.01); F16K 37/0041 (2013.01); F16K 37/0091 (2013.01); F16K 51/02 (2013.01); H01L 21/67017 (2013.01); F16K 37/0025 (2013.01);
Abstract

A vacuum valve system having a valve seat and a valve closure for closing the valve opening. At least two sealing faces are provided, a first sealing face is the valve seat around the valve opening, and a second sealing face is the valve closure. A drive unit coupled to the valve closure designed so that the valve closure can be adjusted to provide respective valve opening states and is movable from an open position to a closed position, in which the second sealing face is pressed in the direction of the first sealing face and the valve opening in a gastight manner. The vacuum valve system has an optical sensor unit, designed to detect an optical measurement signal and an optical detection axis of the optical sensor unit oriented so that the measurement signal can be detected, and can be produced in a test position.


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