logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10516388 B1

PDFFull Text
Date of Patent:
Dec. 24, 2019

Filed:

Jan. 31, 2019

Voltage generator, voltage waveform generator, semiconductor device manufacturing apparatus, voltage waveform generation method, and semiconductor device manufacturing method

Applicant:

Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;

Inventors:

Hye-jin Kim, Hwaseong-si, KR;

Hyun-bae Kim, Yongin-si, KR;

Ju-hyun Kim, Hwaseong-si, KR;

Ji-hwan Kim, Hwaseong-si, KR;

Chan-hee Park, Suwon-si, KR;

Young-hwan Choi, Seoul, KR;

Assignee:

SAMSUNG ELECTRONICS CO., LTD., Suwon-si, Gyeonggi-do, KR;

Attorney:

Lee & Morse, P.C.

Primary Examiner:

Dinh T Le

Int. Cl.
CPC ...
G05F 3/02 (2006.01); H03K 3/64 (2006.01); H01J 37/32 (2006.01); G05F 3/08 (2006.01); H03K 3/021 (2006.01);
U.S. Cl.
CPC ...
H03K 3/64 (2013.01); G05F 3/02 (2013.01); G05F 3/08 (2013.01); H01J 37/321 (2013.01); H01J 37/32146 (2013.01); H01J 37/32174 (2013.01); H03K 3/021 (2013.01);
Abstract

A voltage generator includes a pulse circuit and a slope circuit. The pulse circuit is to apply voltages of three different levels to an output terminal and the slope circuit is to apply a slope voltage to the output terminal. The slope circuit includes an inductor to take current out of a capacitive load connected to the output terminal.

Find Patent Forward Citations

Kim, Hye-jin. (2019). Voltage generator, voltage waveform generator, semiconductor device manufacturing apparatus, voltage waveform generation method, and semiconductor device manufacturing method (U.S. Patent No. 10516388). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10516388

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…