The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 24, 2019
Filed:
Oct. 05, 2016
Applicant:
Lam Research Corporation, Fremont, CA (US);
Inventors:
Mohsen Salek, Saratoga, CA (US);
Richard M. Blank, San Jose, CA (US);
Richard Howard Gould, Fremont, CA (US);
Efrain Quiles, San Jose, CA (US);
Assignee:
Lam Research Corporation, Fremont, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/673 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67393 (2013.01); H01L 21/67017 (2013.01); H01L 21/6719 (2013.01); H01L 21/67126 (2013.01); H01L 21/67161 (2013.01); H01L 21/67178 (2013.01); H01L 21/67201 (2013.01); H01L 21/67389 (2013.01); H01L 21/67766 (2013.01); H01L 21/67772 (2013.01); H01L 21/67778 (2013.01); H01L 21/67781 (2013.01); H01L 21/68707 (2013.01);
Abstract
Systems and techniques for forming buffer gas microclimates around semiconductor wafers in environments external to a semiconductor processing chamber are disclosed. Such systems may include slot doors that may allow for single wafers to be removed from a multi-wafer stack while limiting outflow of buffer gas from a multi-wafer storage system, as well as buffer gas distributors that move in tandem with robot arms used to transport wafers for at least some of the movements of such robot arms.