The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 24, 2019

Filed:

Nov. 28, 2014
Applicants:

Kobelco Research Institute, Inc., Kobe-shi, JP;

Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.), Kobe-shi, JP;

Inventors:

Yuki Tao, Hyogo, JP;

Kenta Hirose, Hyogo, JP;

Norihiro Jiko, Hyogo, JP;

Mototaka Ochi, Hyogo, JP;

Assignees:

KOBELCO RESEARCH INSTITUTE, INC., Kobe-shi, JP;

KOBE STEEL, LTD., Kobe-shi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/34 (2006.01); C23C 14/08 (2006.01); C23C 14/34 (2006.01); C04B 37/02 (2006.01); C04B 35/645 (2006.01); C04B 35/01 (2006.01); C04B 35/453 (2006.01); C04B 35/457 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3429 (2013.01); C04B 35/01 (2013.01); C04B 35/453 (2013.01); C04B 35/457 (2013.01); C04B 35/645 (2013.01); C04B 37/026 (2013.01); C23C 14/086 (2013.01); C23C 14/3414 (2013.01); H01J 37/3491 (2013.01); C04B 2235/3284 (2013.01); C04B 2235/3286 (2013.01); C04B 2235/3293 (2013.01); C04B 2235/6562 (2013.01); C04B 2235/6567 (2013.01); C04B 2235/77 (2013.01); C04B 2235/786 (2013.01); C04B 2235/80 (2013.01); C04B 2237/12 (2013.01); C04B 2237/34 (2013.01); C04B 2237/407 (2013.01);
Abstract

An oxide sintered body is obtained by sintering indium oxide, gallium oxide and tin oxide. The oxide sintered body has a relative density of 90% or more and an average grain size of 10 μm or less. In the oxide sintered body, the relations 30 atomic %≤[In]≤50 atomic %, 20 atomic %≤[Ga]≤30 atomic % and 25 atomic %≤[Sn]≤45 atomic % are satisfied. [In], [Ga] and [Sn] are ratios of contents (atomic %) of indium gallium and tin, respectively, to all metal elements contained in the oxide sintered body. The oxide sintered body has an InGaOphase which satisfies the relation [InGaO]≥0.05.


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