The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 24, 2019
Filed:
Jan. 30, 2017
Dongfang Jingyuan Electron Limited, Beijing, CN;
Jie Lin, San Jose, CA (US);
Zhaoli Zhang, San Jose, CA (US);
Dongfang Jingyuan Electron Limited, Beijing, CN;
Abstract
Methods and systems for inspecting integrated circuits are provided. The method includes generating care areas that each includes at least one potential defect, organizing the generated care areas based on a first set of spatial relationships to provide a list of neighboring care areas, wherein each neighboring care area is an entry within the list, and generating a recipe file of the list, wherein each neighboring care area is inspected sequentially using a high-resolution inspection system. The system comprises a memory including instructions executable by a processor to: generate care areas that each includes at least one potential defect, organize the generated care areas based on a first set of spatial relationships to provide a list of neighboring care areas that are each an entry within the list, and generate a recipe file of the list, wherein each neighboring care area is inspected sequentially using a high-resolution inspection system.