The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 24, 2019

Filed:

Mar. 15, 2016
Applicant:

Nsk Ltd., Tokyo, JP;

Inventors:

Tsuyoshi Nakamura, Kanagawa, JP;

Takashi Kuramochi, Kanagawa, JP;

Assignee:

NSK LTD., Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B25B 11/00 (2006.01); B23Q 1/62 (2006.01); F16C 29/00 (2006.01); G03F 7/00 (2006.01); G03F 7/20 (2006.01); H01L 21/683 (2006.01); G01D 11/30 (2006.01); H01L 21/68 (2006.01);
U.S. Cl.
CPC ...
B23Q 1/623 (2013.01); F16C 29/008 (2013.01); G03F 7/0007 (2013.01); G03F 7/70716 (2013.01); F16C 2322/39 (2013.01); G01D 11/30 (2013.01); H01L 21/68 (2013.01); H01L 21/683 (2013.01);
Abstract

A table apparatus includes a first driver applying force in a first axis direction to a table, and a second driver applying force in a second axis direction to the table. The first driver includes a first actuator generating power for moving the table in the first axis direction, and a first movable member moving along a first drive axis parallel to the first axis by actuation of the first actuator. The first movable member includes: a first linear bearing moving along the first drive axis; a first rotary bearing disposed around a first rod member fixed to the first linear bearing and rotatable relative to the first rod member; and a second linear bearing connected to the first rotary bearing and guided in the second axis direction by a second guide member fixed to an edge of the table in the first axis direction.


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