The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 24, 2019

Filed:

Sep. 23, 2015
Applicant:

Imt Co., Ltd., Suwon, KR;

Inventor:

Sung Ho Cho, Yongin, KR;

Assignee:

IMT CO., LTD., Suwon, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 7/00 (2006.01); B08B 15/00 (2006.01); B08B 11/00 (2006.01); B08B 15/04 (2006.01); B24C 1/00 (2006.01); B24C 9/00 (2006.01); B05B 7/08 (2006.01); B05B 14/30 (2018.01); B05B 7/06 (2006.01); H01L 21/02 (2006.01); B05B 9/00 (2006.01);
U.S. Cl.
CPC ...
B08B 7/0021 (2013.01); B05B 7/0884 (2013.01); B08B 11/00 (2013.01); B08B 15/007 (2013.01); B08B 15/04 (2013.01); B24C 1/003 (2013.01); B24C 9/00 (2013.01); B05B 7/066 (2013.01); B05B 9/005 (2013.01); B05B 14/30 (2018.02); B08B 2203/0229 (2013.01); H01L 21/02101 (2013.01);
Abstract

The present invention relates to a dry cleaning technology for a cleaning a surface of an object to be cleaned by adiabatically expanding liquid carbon dioxide to generate sublimable dry ice particles and carrying the dry ice particles on high-speed carrier gas to be sprayed onto the surface of the object to be cleaned, wherein an end of a liquid carbon dioxide nozzle further protrudes to the outside relative to an end of a carrier gas nozzle to prevent a growth of dry ice particles in the carrier gas nozzle, a hydrophobic coating is formed on a surface of the liquid carbon dioxide nozzle to prevent a formation of water droplets and to prevent an occurrence of irregular dry ice particles, thereby effectively preventing damage to a surface of an object to be cleaned and being advantageous in an economical aspect by significantly reducing consumption of liquid carbon dioxide.


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