The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 24, 2019
Filed:
Feb. 15, 2017
Applicant:
Murata Manufacturing Co., Ltd., Nagaokakyo-shi, Kyoto-fu, JP;
Inventor:
Hideki Kawamura, Nagaokakyo, JP;
Assignee:
MURATA MANUFACTURING CO., LTD., Nagaokakyo-Shi, Kyoto-Fu, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
A61B 5/11 (2006.01); H01L 41/193 (2006.01); A61B 5/00 (2006.01); G01B 7/16 (2006.01); H01L 41/047 (2006.01); H01L 41/08 (2006.01); H01L 41/113 (2006.01);
U.S. Cl.
CPC ...
A61B 5/11 (2013.01); A61B 5/6824 (2013.01); A61B 5/6831 (2013.01); G01B 7/22 (2013.01); H01L 41/0477 (2013.01); H01L 41/0805 (2013.01); H01L 41/1132 (2013.01); H01L 41/193 (2013.01);
Abstract
A capacitor is coupled in parallel with a piezoelectric unit in a sensor. The piezoelectric unit is formed by a film which is sandwiched between a signal electrode and a reference potential electrode. A capacitor is formed by a dielectric film located between the signal electrode and a reference potential electrode. As a result, the capacitance of the sensor element is higher than it would be if the sensor only contained the piezoelectric unit.