The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 17, 2019
Filed:
Aug. 20, 2015
Hitachi Metals, Ltd., Minato-ku, Tokyo, JP;
Tomokazu Hirota, Mie, JP;
Hiroyuki Ito, Mie, JP;
Hitachi Metals, Ltd., Tokyo, JP;
Abstract
A mass flow controller includes a flow meter, a mechanical pressure-regulating valve disposed adjacent to and on an upstream side of the flow meter, and a flow control valve disposed on a downstream side of the flow meter. The mechanical pressure-regulating valve is embedded in a base of the mass flow controller. The mass flow controller also includes a compulsive valve-opening mechanism configured to compulsorily open the mechanical pressure-regulating valve. Thereby, the mass flow controller can instantly recover pressure on the upstream side of the flow meter to its original pressure even in a case where the pressure changes, and can raise measurement accuracy of a flow rate measured by the flow meter.