The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 17, 2019
Filed:
Feb. 14, 2019
Applicant:
The University of British Columbia, Vancouver, CA;
Inventors:
Assignee:
The University of British Columbia, Vancouver, CA;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H04R 31/00 (2006.01); G01N 29/24 (2006.01); H01L 41/09 (2006.01); B81B 3/00 (2006.01); B06B 1/02 (2006.01); H01L 41/27 (2013.01);
U.S. Cl.
CPC ...
G01N 29/2406 (2013.01); B06B 1/0292 (2013.01); B81B 3/0021 (2013.01); H01L 41/0973 (2013.01); H01L 41/27 (2013.01);
Abstract
Methods and techniques for fabricating layered structures, such as capacitive micromachined ultrasound transducers, as well as the structures themselves. The layered structure has a membrane that includes a polymer-based layer and a top electrode on the polymer-based layer. The membrane is suspended over a closed cavity and may be actuated by applying a voltage between the top electrode and a bottom electrode that may be positioned along or be a bottom of the closed cavity. The layered structure may be fabricated using a wafer bonding process.