The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 17, 2019
Filed:
Mar. 23, 2017
Hitachi, Ltd., Tokyo, JP;
Kazuyoshi Yamazaki, Tokyo, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
An interference measurement device configured to detect a phase from an interference beam between an object beam and a reference beam, includes: a laser beam source; a splitter configured to split an emitted beam from the laser beam source into the object beam and the reference beam; an object beam optical unit configured to make only the object beam incident on a measurement object; a combination unit configured to combine the object beam and the reference beam; a phase element configured to vary mutual relationship in phase between the object beam and the reference beam; and a detector configured to detect the interference beam between the object beam and the reference beam. A signal of a spatial phase variation of the measurement object is directly operated, based on at least two measurement results of an intensity signal with the detector.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile