The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 17, 2019

Filed:

Jan. 27, 2017
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;

Inventors:

Byeong-Hoon Kim, Hwaseong-si, KR;

Byung-Hwan Kong, Uiwang-si, KR;

Sung-Han Lee, Seongnam-si, KR;

Sun Cho, Yongin-si, KR;

Seung-Hwan Kang, Anyang-si, KR;

Seung-Ho Lee, Cheonan-si, KR;

Han-Seo Ko, Seoul, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/02 (2006.01); C23C 16/458 (2006.01); F28F 13/18 (2006.01); H05B 1/02 (2006.01); H05B 3/46 (2006.01); C23C 16/46 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
C23C 16/0209 (2013.01); C23C 16/4584 (2013.01); C23C 16/4587 (2013.01); C23C 16/46 (2013.01); C23C 16/463 (2013.01); F28F 13/18 (2013.01); H01L 21/67017 (2013.01); H01L 21/67109 (2013.01); H01L 21/67115 (2013.01); H05B 1/0233 (2013.01); H05B 3/46 (2013.01);
Abstract

A heating apparatus including a side wall heat insulator configured to provide an inner space for receiving a reaction tube, an upper wall heat insulator covering a top portion of the side wall heat insulator, a heat generation part in an inner surface of the side wall heat insulator, and a heat compensating part on a lower surface of the upper wall heat insulator, the heat compensating part including a reflection surface in a first region on the lower surface of the upper wall heat insulator, the first region having a first emissivity less than an emissivity of the upper wall heat insulator may be provided.


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