The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 10, 2019
Filed:
Jul. 07, 2017
Applicant:
Infineon Technologies Ag, Neubiberg, DE;
Inventors:
Wolfgang Klein, Zorneding, DE;
Reinhard Gabl, Kufstein, AT;
Assignee:
INFINEON TECHNOLOGIES AG, Neubiberg, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H04R 7/02 (2006.01); H04R 23/00 (2006.01); H04R 19/00 (2006.01);
U.S. Cl.
CPC ...
H04R 7/02 (2013.01); H04R 19/005 (2013.01); H04R 23/00 (2013.01); H04R 2201/003 (2013.01);
Abstract
According to an embodiment, a microfabricated structure includes a cavity disposed in a substrate, a first clamping layer overlying the substrate, a deflectable membrane overlying the first clamping layer, and a second clamping layer overlying the deflectable membrane. A portion of the second clamping layer overlaps the cavity.