The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 10, 2019

Filed:

Feb. 20, 2018
Applicant:

The Hong Kong University of Science and Technology, Kowloon, HK;

Inventors:

Lei Lu, Kowloon, HK;

Wei Zhou, New Territories, HK;

Man Wong, New Territories, HK;

Hoi Sing Kwok, New Territories, HK;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/12 (2006.01); H01L 29/786 (2006.01); H01L 21/266 (2006.01); H01L 27/32 (2006.01); G02F 1/1368 (2006.01);
U.S. Cl.
CPC ...
H01L 27/1251 (2013.01); H01L 27/127 (2013.01); H01L 27/1225 (2013.01); H01L 27/1288 (2013.01); H01L 29/7869 (2013.01); H01L 29/78675 (2013.01); G02F 1/1368 (2013.01); G02F 2001/13685 (2013.01); G02F 2202/104 (2013.01); H01L 21/266 (2013.01); H01L 27/3262 (2013.01); H01L 29/78618 (2013.01); H01L 29/78696 (2013.01);
Abstract

This disclosure relates generally to the three-dimensional (3D) integrated thin-film transistors (TFTs) with silicon and metal-oxide (MO) semiconductors as the active layers. In one or more embodiments, an apparatus is provided that comprises a first transistor comprising a silicon active layer, and a second transistor comprising a metal oxide active layer. The second transistor is vertically stacked on the first transistor, and the first transistor and the second transistor share a gate electrode formed between the silicon active layer and the metal oxide active layer. With these embodiments, the gate electrode corresponds to a top gate of the first transistor and a bottom gate of the second transistor.


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