The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 10, 2019

Filed:

Nov. 16, 2017
Applicant:

Murata Machinery, Ltd., Kyoto-shi, Kyoto, JP;

Inventors:

Gerhard Dovids, Grabs, CH;

Yves Fenner, Berg, CH;

John Fiddes, Kreuzlingen, CH;

Christian Wohanka, Tägerwilen, CH;

Bernd Rahrbach, Constance, DE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/677 (2006.01); H01L 21/673 (2006.01); B65G 1/137 (2006.01); G05B 19/418 (2006.01); G06F 3/048 (2013.01); G06Q 10/04 (2012.01);
U.S. Cl.
CPC ...
H01L 21/67763 (2013.01); B65G 1/137 (2013.01); G05B 19/41835 (2013.01); G06F 3/048 (2013.01); G06Q 10/04 (2013.01); H01L 21/67346 (2013.01); H01L 21/67772 (2013.01); H01L 21/67778 (2013.01);
Abstract

A substrate production, manufacturing, and processing system includes storages with one or more separations that store substrates, loading stations that include robots, opener systems, and a software management system. The storage separations hold first containers that store carriers and the substrates in stacks. Each robot is able to access and move at least one of: the first container, a second container or carrier, and one of the substrates. The opener systems open the first containers such that the carriers and the substrates are able to be accessed by the robots in the loading station, and the software management system assigns at least one category to each stack of carriers and the substrates. The first containers store the substrates with a higher density than the second container or carrier, and the opener systems each include effectors that each hold an individual one of the substrates.


Find Patent Forward Citations

Loading…