The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 10, 2019
Filed:
Dec. 05, 2017
Horiba Stec, Co., Ltd., Kyoto-shi, Kyoto, JP;
HORIBA STEC, Co., Ltd., Kyoto-shi, Kyoto, JP;
Abstract
A flow rate control apparatus is provided which enables high speed response particularly in a transient response state, such as when a target flow rate falls. The flow rate control apparatus includes: a valve provided with a position sensor to measure an opening degree and disposed in a flow channel; a flow rate sensor disposed upstream of the valve and provided with a restrictor; a first pressure sensor disposed downstream of the restrictor and disposed upstream of the valve; a second pressure sensor disposed downstream of the valve; a storage section to store a characteristic map indicating a relationship between at least the opening degree of the valve, a differential pressure before and after the valve, and a flow rate of a fluid passing through the flow channel; and a valve control section to control the valve so that the flow rate reaches an accepted target flow rate.