The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 10, 2019
Filed:
Nov. 09, 2016
Hitachi, Ltd., Tokyo, JP;
Takashi Shiota, Tokyo, JP;
Tatsuyuki Saito, Tokyo, JP;
Tatemi Ido, Tokyo, JP;
Noriyuki Sakuma, Tokyo, JP;
Yuudai Kamada, Tokyo, JP;
Atsushi Isobe, Tokyo, JP;
Chisaki Takubo, Tokyo, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
Airtightness in a cavity of an inertial sensor (acceleration sensor) is increased to achieve high sensitivity. In the acceleration sensor having movable electrodes VE, VEand fixed electrodes FE, FE, the fixed electrodes are formed by portions surrounded by a through hole THprovided in a cap layer CL, and the through hole is filled with an insulating film IFand polysilicon P and has a wide portion (WP). The wide portion has a gap SP that is not filled with the insulating film IFand the polysilicon P, and the gap SP is filled with the interlayer insulating film ID. With such a configuration, degassing can be exhausted through the gap (airway) SP in a pressure reducing step.