The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 10, 2019

Filed:

Feb. 08, 2018
Applicant:

Daifuku Co., Ltd., Osaka-shi, JP;

Inventors:

Toshihito Ueda, Hinocho, JP;

Jun Tanaka, Hinocho, JP;

Shinsuke Kawamura, Hinocho, JP;

Assignee:

Daifuku Co., Ltd., Osaka-shi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01F 7/00 (2006.01); H01L 21/677 (2006.01); G01F 9/00 (2006.01);
U.S. Cl.
CPC ...
G01F 7/005 (2013.01); G01F 9/008 (2013.01); H01L 21/67769 (2013.01);
Abstract

A flow rate measurement system measures, by using a flow rate measurement device, a flow rate of cleaning gas in a container storage facility including: a storage rack including supporting portions; a transport device that transports a container to the supporting portions; and a gas supply device that supplies the cleaning gas to the container supported by the supporting portions. The transport device and the flow rate measurement device are connected via a power line communicatively by wire or wireless. The flow rate measurement device measures the flow rate of the cleaning gas in a state in which the transport device has transported the flow rate measurement device and the flow rate measurement device is placed on a target supporting portion.


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