The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 10, 2019
Filed:
Jun. 19, 2018
Applicant:
Robert Bosch Gmbh, Stuttgart, DE;
Inventor:
Martin Rambach, Pliezhausen, DE;
Assignee:
Robert Bosch GmbH, Stuttgart, DE;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B81B 7/00 (2006.01);
U.S. Cl.
CPC ...
B81B 7/0038 (2013.01); B81B 7/0041 (2013.01); B81B 2203/0315 (2013.01); H01L 2224/05166 (2013.01); H01L 2924/1461 (2013.01);
Abstract
A micromechanical device having a first cavity, which has a MEMS element, and having a second cavity. The second cavity is connected to the first cavity with a connection channel, the connection channel having a seal by which the first cavity and the second cavity are hermetically sealed from each other, the seal being able to be opened electrically.