The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 03, 2019
Filed:
Oct. 12, 2016
Qualcomm Incorporated, San Diego, CA (US);
Hrishikesh Vijaykumar Panchawagh, Cupertino, CA (US);
Suryaprakash Ganti, Los Altos, CA (US);
Kostadin Dimitrov Djordjev, San Jose, CA (US);
David William Burns, San Jose, CA (US);
Timothy Alan Dickinson, Carlsbad, CA (US);
Donald William Kidwell, Jr., Los Gatos, CA (US);
Ravindra Vaman Shenoy, Dublin, CA (US);
Jon Bradley Lasiter, Stockton, CA (US);
Hao-Yen Tang, Berkeley, CA (US);
Yipeng Lu, Davis, CA (US);
QUALCOMM Incorporated, San Diego, CA (US);
Abstract
An ultrasonic sensor pixel includes a substrate, a piezoelectric micromechanical ultrasonic transducer (PMUT) and a sensor pixel circuit. The PMUT includes a piezoelectric layer stack including a piezoelectric layer disposed over a cavity, the cavity being disposed between the piezoelectric layer stack and the substrate, a reference electrode disposed between the piezoelectric layer and the cavity, and one or both of a receive electrode and a transmit electrode disposed on or proximate to a first surface of the piezoelectric layer, the first surface being opposite from the cavity. The sensor pixel circuit is electrically coupled with one or more of the reference electrode, the receive electrode and the transmit electrode and the PMUT and the sensor pixel circuit are integrated with the sensor pixel circuit on the substrate.