The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 03, 2019
Filed:
Aug. 18, 2015
Applicant:
Invensense, Inc., San Jose, CA (US);
Inventors:
Julius Ming-Lin Tsai, San Jose, CA (US);
Michael Daneman, Campbell, CA (US);
Assignee:
INVENSENSE, INC., San Jose, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/113 (2006.01); H01L 41/31 (2013.01); G06K 9/00 (2006.01); H01L 27/20 (2006.01); B81C 1/00 (2006.01); G01N 29/24 (2006.01);
U.S. Cl.
CPC ...
H01L 27/20 (2013.01); B81C 1/00246 (2013.01); G01N 29/2437 (2013.01); G06K 9/00006 (2013.01); H01L 41/1132 (2013.01); H01L 41/31 (2013.01); G01N 2291/023 (2013.01);
Abstract
Microelectromechanical (MEMS) devices and associated methods are disclosed. Piezoelectric MEMS transducers (PMUTs) suitable for integration with complementary metal oxide semiconductor (CMOS) integrated circuit (IC), as well as PMUT arrays having high fill factor for fingerprint sensing, are described.