The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 03, 2019

Filed:

Oct. 29, 2014
Applicants:

Murata Integrated Passive Solutions, Caen, FR;

Commissariat a L'energie Atomique ET Aux Energies Alternatives, Paris, FR;

Inventors:

Frédéric Voiron, Barraux, FR;

Guy Parat, Claix, FR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 27/08 (2006.01); H01G 4/005 (2006.01); H01L 21/3213 (2006.01); H01L 21/02 (2006.01); H01L 49/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/32133 (2013.01); H01L 21/02258 (2013.01); H01L 27/0805 (2013.01); H01L 28/60 (2013.01); H01G 4/005 (2013.01);
Abstract

A Metal-Insulator-Metal type capacitor structure () comprising a substrate (), a first electrically insulating layer () placed on the substrate (), a lower electrode () placed on the first insulating layer (), a layer of structured metal () comprising a plurality of pores disposed on the lower electrode (), a MIM capacitor () comprising a first conductive layer () placed on the structured metal layer () in contact with the lower electrode () and inside the pores, a dielectric layer () covering the first conductive layer (), a second conductive layer () covering the dielectric layer () in contact with an upper electrode () placed on the MIM capacitor () and a second electrically insulating layer () placed on the upper electrode ().


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