The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 03, 2019
Filed:
Jan. 09, 2017
Applicant:
Screen Holdings Co., Ltd., Kyoto, JP;
Inventors:
Akio Hashizume, Kyoto, JP;
Takashi Ota, Kyoto, JP;
Assignee:
SCREEN Holdings Co., Ltd., , JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); B05C 11/08 (2006.01); B08B 3/08 (2006.01); H01L 21/311 (2006.01); B05C 9/14 (2006.01); B05C 11/10 (2006.01); G03F 7/42 (2006.01);
U.S. Cl.
CPC ...
H01L 21/31138 (2013.01); B05C 9/14 (2013.01); B05C 11/08 (2013.01); B05C 11/1015 (2013.01); B08B 3/08 (2013.01); H01L 21/67034 (2013.01); H01L 21/67051 (2013.01); H01L 21/67109 (2013.01); G03F 7/42 (2013.01); H01L 21/31133 (2013.01);
Abstract
In a substrate processing method, a substrate holding unit holds a substrate in a horizontal position, a processing liquid supplying unit supplies first and second processing liquids to the surface of the substrate held by the substrate holding unit, a substrate rotating unit rotates the substrate held by the substrate holding unit, a heater opposes the substrate held by the substrate holding unit, and a moving unit moves at least one of the substrate holding unit and the heater supporting member such that the heater and the substrate are held in two different relative positions.