The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 03, 2019
Filed:
Dec. 30, 2016
Daniel T. Mudd, Reno, NV (US);
Patti J Mudd, Reno, NV (US);
Daniel T. Mudd, Reno, NV (US);
Patti J Mudd, Reno, NV (US);
Other;
Abstract
A gas flow control showerhead with integrated characterized restrictions for a gas delivery system. An input distribution disk with a plurality of inputs is fluidly coupled to a plurality of conduits each conduit exhausting a process gas to the input distribution disk from a controllable pressure regulator in a gas box. A plurality of restriction flow paths is formed by one or more stacked triples of plenum disks, restriction disks, and outlet diffuser disks that are grouped with each group providing a pressure drop used in control of a mass flow rate of a process gas. Each outlet diffuser disk having a plurality of outputs distributed around different locations of the outlet diffuser disks exhausting the process gases for application to a wafer being processed within a process chamber at designated mass flow rates.